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  • Measure the hardness and elastic modulus of ultrathin films with nanometer-scale indentation: ENT-5
Sensors & Detectors

Measure the hardness and elastic modulus of ultrathin films with nanometer-scale indentation: ENT-5

ELIONIX INC.
ENT-5 standard equipment composition

ENT-5 standard equipment composition

Over 300 units sold worldwide, including to TUM (Technische Universität München) in Germany

ELIONIX's ENT-5 is a nanoindentation tester capable of measuring the hardness and elastic modulus of thin films less than 1 micrometer thick.
It features a wide range of measurement loads from 0.5 µN to 2 N, which includes the indentation load range of a Vickers hardness tester.
The high-speed mapping function allows for measurements at a speed of up to 1 point per second.
It can also measure the fracture and deformation strength of particles as small as a few micrometers.
Creating analysis reports is also easy, with test results immediately exportable as CSV or PDF files.

The measurement chamber is shielded and temperature-controlled.

The measurement chamber is shielded and temperature-controlled.

Highly Reproducible Data from Nanometer-Scale Indentation Testing

Equipped with built-in mechanisms to minimize environmental disturbances, the ENT-5 ensures consistent, repeatable results regardless of operator or location. An active vibration isolation system comes standard. The testing mechanism is enclosed within a shield against drafts and noise while maintaining a stable internal temperature. Furthermore, key components are made from low thermal expansion materials to prevent temperature-induced measurement drift.
The high-load unit enables nano-scale testing.

The high-load unit enables nano-scale testing.

Hardness and elastic modulus measurement in the 0.5 µN to 2 N range. Also suitable for microparticle strength testing

With interchangeable high-load (5 μN–2 N) and low-load (0.5 μN–10 mN) measurement units, the ENT-5 can accommodate a wide range of materials and indentation depths—from soft films and resins to hard coatings such as DLC and plating. Using a flat-punch indenter, it can also perform compression strength tests on particles as small as 2–4 μm.
An intuitive interface makes the system easy to operate.

An intuitive interface makes the system easy to operate.

User-Friendly Design with Excellent Operability and Minimal Downtime

Optimized for intuitive use in multi-user environments, the ENT-5 allows pre-configured test parameters to be executed automatically, eliminating the need for constant operator input. Upon completion, data can be exported as PDFs, CSV files, graphs, and CMOS images (before/after testing), streamlining report and paper preparation. In the rare event of a malfunction, unitized components minimize downtime. The software supports Japanese, English, and Chinese, and sample holders can be custom-ordered.

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