Ultra-High Contrast Design Specifically For Silicon Transmission Observation: Semiconductor Internal Observation Microscope SWIR-7200A

SEIWA OPTICAL Co., Ltd.

Semiconductor Internal Observation Microscope

By Blocking Visible Light, All Functions Are Concentrated Within The SWIR Range, Clearly Displaying Metal Patterns Through Silicon

The SWIR-7200A is a semiconductor internal observation microscope specifically developed for the wavelength range of 1100 to 2000 nm, which transmits through silicon, and is specifically designed for use with SWIR (InGaAs) cameras. Unlike typical near-infrared microscopes, it eliminates the ability to observe in the visible range, which is visible to the human eye. By applying a unique optical design optimized for the target wavelength and a special AR coating, we have made it possible to observe metal patterns transmitted through silicon with extremely strong contrast never seen before. With over 10 units installed in leading semiconductor manufacturers worldwide, it is chosen as a reliable tool supporting quality assurance and technological development in the field of internal inspection and defect analysis of mounted IC chips.

SWIR Objective Lens

Uniquely Designed Objective Lens And Specialized Technology To Correct Silicon Aberrations

It features a unique optical design optimized for the 1100-2000 nm range and a dedicated AR coating. Furthermore, in order to correct the aberrations that occur in the silicon layer during high-magnification observation, we have prepared five types of interchangeable "silicon correction caps" that correspond to thicknesses of 0.1 to 0.9 mm.
This makes it possible to visualize the fine metal patterns and defects of next-generation semiconductor devices with extremely sharp resolution, regardless of the sample thickness.

Near-Infrared Halogen And LED Lighting Systems

An Ideal Near-Infrared Illumination System That Combines Wavelength Selectivity And High Brightness.

The observation wavelength can be switched using a bandpass filter to match the conditions of the sample (silicon). The standard high-output near-infrared halogen light source boasts an overwhelming amount of light that can provide sufficient brightness for a 100x objective lens, even when only a limited wavelength is extracted through a filter. Even with samples that have a thick silicon layer or wafers, selecting the optimal wavelength that suppresses unwanted reflections dramatically clarifies the internal structure. We always provide the best possible "visuals" in any inspection environment.

A Global Support System Connecting Parts Of The World

A Trusted Global Network Chosen By World-Class Manufacturers

The SWIR-7200A has been installed in the quality assurance and technology development sites of the world's leading semiconductor manufacturers, with more than 10 units installed. We are not just a manufacturer of equipment; as specialists in optical technology cultivated since our founding in 1947, we work together with our customers to solve their challenges. We are able to provide rapid technical support and solutions through our major locations in the United States, Europe, Taiwan, South Korea, and Southeast Asia such as Malaysia and Singapore. Our continued participation in major international trade shows, including SEMICON, is a testament to our global credibility. Our highly advanced, integrated production quality, originating in Japan, can be used with confidence in any workplace around the world.

URL (Japanese): https://www.seiwaopt.co.jp/

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