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Wafer Plating Equipment Adopted by over 100 Research Institutions

YAMAMOTO-MS Co., Ltd.
Wafer Plating Equipment Adopted by over 100 Research Institutions

Wafer Plating Equipment Adopted by over 100 Research Institutions

We Offer Plating Equipment That Can Accommodate Wafers of Various Sizes and Shapes, from ø2 to 12 Inches.

We will propose a system including draft chamber usage if you tell us the type and bath temperature of the plating,
the size of the sample to be plated, the desired amount of plating solution and the rough specifications of the plating.
Our semiconductor plating equipment has a track record of 26 years and is used by many research institutes and manufacturers.
We can perform precision plating on silicon wafers, glass substrates, ceramic substrates,
special materials, films, etc., research on semiconductors, MEMS, LIGA, various sensors, photovoltaic power generation, aerospace industry, chemical industry, and various raw materials, etc.
We have many achievements with small-volume production equipment.

Photo Images of the Equipment and Samples after Copper Sulfate Plating. (From the LAAS laboratory at CNRS, France)

Photo Images of the Equipment and Samples after Copper Sulfate Plating. (From the LAAS laboratory at CNRS, France)

Plating with a Film Thickness Distribution of ±3-5% or Less Is Possible.

A unique liquid flow design that combines air agitation and paddle agitation, and an overflow structure that generates uniform convection from the bottom, provide stable plating on the entire wafer surface. Compatible with various sizes from ø2 to 12 inches, and can be used with a variety of substrate materials such as Si, SiC, GaAs, and InP. (As an experimental example, copper sulfate plating on 8-inch silicon wafers allows plating with a film thickness distribution of ±3 to 5% or less.)
A Complete Set of Wafer Plating System.

A Complete Set of Wafer Plating System.

Experiments Can Be Conducted under Various Conditions.

There are multiple types of cathode cartridge,including standard, sealed, suction-sealed, and double-sided. It can be replaced to match the size and shape of the sample. It can also be installed as a set including a filter, heater, and air pump. The catalog is available for download from the website.
Photo Images of a Silicon Wafer

Photo Images of a Silicon Wafer

Both Available Domestically and Internationally

We have a lineup that complies with IEC standards, and can be introduced without the hurdle of export standards (manufactured under an ISO9001/ISO14001 registered quality control system). We have a proven track record in research and small-scale production across a wide range of fields, including semiconductors, MEMS, LIGA, sensors, solar power generation, aerospace, and the chemical industry. We also provide local support through our network of overseas agents and technical partners.

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