Smart Actuator Series:Piezo Assist Motor®

Mechano Transformer Corporation

Piezo Assist Motor<span><sup>Ⓡ</sup></span>

Piezo Assist Motor

Making Nanometer-Level Positioning Easy

As industries evolve, the demand for extreme precision is skyrocketing—from high-density semiconductor manufacturing and advanced materials science to cellular-level medical procedures. Nanometer-scale manipulation is no longer a luxury; it is a necessity.

Piezo Assist Motor is our answer to this challenge.

This compact piezo actuator delivers an impressive resolution of 30 nanometers. Designed for seamless integration, it simply replaces the micrometer head on your precision stage. Once installed, it allows for automated, ultra-precise positioning via a dedicated controller.

Beyond its sub-30nm resolution, this motor features a 13mm travel range and a unique ability to hold its position without a power supply. This zero-drift, zero-heat holding capability makes it a game-changer for micro-manipulators used in microscopic assembly and high-resolution microscopy.

Automate your precision stages and streamline your production floor today.
Contact us to leverage our extensive experience and patented piezo technology for your business.

Installation Example

Installation Example

Large Displacement, High Durability, Zero Backlash: The Ultimate Compact Piezo Actuator

1. Unmatched Resolution
By utilizing the precise expansion of piezoelectric elements in response to voltage, we achieve superior resolution. Our motors deliver precision of 30 nanometers or less.

2. High-Speed Performance
Despite a travel range of over 13mm, the unit is capable of driving at speeds up to 1,500 Hz.

3. Compact Powerhouse
Measuring just 61mm x 31mm x 15.1mm and weighing only around 50g, this small unit packs a punch. It withstands loads over 29.4N and can drive while holding a load of up to 3kg.

4. Energy Efficient & Zero-Power Hold
Direct conversion of electrical to mechanical energy ensures high efficiency. Crucially, it maintains its position and holds loads with virtually zero power consumption when static, eliminating heat generation.

5. Industrial-Grade Durability
Built to last, our products have withstood rigorous testing of over 1 billion drive cycles.

6. Zero Backlash
Unlike conventional electric motors, our design eliminates cams and reduction gears. The result is absolute zero backlash.
Installation Example

Installation Example

Application: Mirror Mounts

The versatility of the Piezo Assist Motor extends far beyond standard precision stages. One key application is the automation of mirror mounts.

Thanks to its ultra-high resolution, adjustments can be made in microradians. Simply replace the mirror mount's adjustment screws with our motor to achieve automated, ultra-precise positioning via a dedicated controller. Just like our stages, it holds its position without power, ensuring stability.

This stability makes it ideal for interferometric shape measurement, laser irradiation, and laser welding positioning.

Integration is seamless. Control the motor via PC or PLC using RS-232C, USB, or RS485 interfaces through command lines or our dedicated software. A single controller can manage up to four motors simultaneously.
Patent Applications and Registrations (Domestic & International)

Patent Applications and Registrations (Domestic & International)

Proven Expertise and Track Record

We are a comprehensive solution provider capable of not only designing displacement magnification mechanisms and piezoelectric drive methods but also handling manufacturing and mass production technologies.

As a global pioneer in this field, we possess over 18 years of development experience, deep industry know-how, and a robust portfolio of patents.

Our intellectual property focuses heavily on piezo actuators, with numerous patents applied for and acquired both domestically in Japan and internationally (see chart).

We have a proven track record of delivering solutions to industries where extreme precision is non-negotiable, including optical instruments, precision measurement, and manufacturing equipment for semiconductors and electronic devices.